ACTUATOR DEVICE, TEST DEVICE, AND ACTUATOR CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide an actuator device which accurately controls location of an actuator.

SOLUTION: An actuator device comprises an actuator which operates according to a control signal and a control part which provides the control signal for setting the temperature of the actuator as reference temperature when operating the actuator, a test device, and an actuator control method are provided. It also comprises a temperature detection part which detects the temperature of the actuator. The temperature detection part detects the temperature of the actuator, and the control part controls the size of the control signal provided to the actuator according to the temperature detected by the temperature detection part.

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