OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICONDUCTOR SUBSTRATES
摘要
A quartz window with an interior plenum is operable as a shutter or UV filter in a degas chamber by supplying the plenum with an ozone-containing gas. Pressure in the plenum can be adjusted to block UV light transmission into the degas chamber or adjust transmittance of UV light through the window. When the plenum is evacuated, the plenum allows maximum transmission of UV light into the degas chamber.
申请公布号
WO2011155985(A2)
申请公布日期
2011.12.15
申请号
WO2011US01032
申请日期
2011.06.08
申请人
LAM RESEARCH CORPORATION;WANG, YEN-KUN VICTOR;CHOU, SHANG-I;AUGUSTINO, JASON
发明人
WANG, YEN-KUN VICTOR;CHOU, SHANG-I;AUGUSTINO, JASON