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发明名称
OPTISCHE BELEUCHTUNGSEINHEIT FÜR DIE EUV- MIKROLITHOGRAFIE
摘要
申请公布号
AT534938(T)
申请公布日期
2011.12.15
申请号
AT20100191631T
申请日期
2010.11.18
申请人
CARL ZEISS SMT GMBH
发明人
ENDRES, MARTIN;DOERN, SEBASTIAN;BIELING, STIG;KIRCH, MARC
分类号
G03F7/20;G02B5/09
主分类号
G03F7/20
代理机构
代理人
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地址
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