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发明名称
BEWEGLICHER PHASENSCHRITT-MIKROSPIEGEL MIT EINEM MEHRSCHICHTIGEN SUBSTRAT UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号
AT534058(T)
申请公布日期
2011.12.15
申请号
AT20070856289T
申请日期
2007.11.28
申请人
MICRONIC MYDATA AB;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
SCHMIDT, JAN;BAKKE, THOR;FRIEDRICHS, MARTIN;DUERR, PETER
分类号
G03F7/20;G02B26/08
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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