| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an eddy current inspection device capable of detecting a physical property of a sample with high precision by accurately acquiring a sensitivity of a sensor, and an eddy current type inspection method. <P>SOLUTION: The eddy current inspection device 1 comprises a sensor 10 that outputs a detection value according to change of an eddy current, feeding means 31 that supplies the magnetizing current set as prescribed frequency to the sensor 10, moving means 15 that relatively moves the sensor 10 with respect to a structure 2, and sensitivity acquisition means 32 that acquires the sensitivity of the sensor 10 based on a plurality of detection values. <P>COPYRIGHT: (C)2012,JPO&INPIT |
