发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting device capable of stably supplying cutting water at a desired position, even when a pipe nozzle having a thin diameter is formed. <P>SOLUTION: A cutting water supply nozzle 60 includes: a rigid bracket 61 vertically extending to a process height; and a cylindrical-shaped pipe nozzle 62 being mounted on the lower end of the rigid bracket 61 and extending to the horizontal direction and having a plurality of injection slits 623 on the side faces of the self-pipe nozzle. On the lower end of the rigid bracket 61, there are provided a fitting portion 611 to fit the outer circumference plane of the pipe nozzle 62 and a fitting direction specification guide 612 to guide by specifying the fitting direction to specify the injection direction of each injection slit 623. The pipe nozzle 62 includes a guided portion 624 engaged with the fitting direction specification guide 612. When the guided portion 624 is mounted by the guidance of the fitting direction specification guide 612, the injection direction of the injection slit 623 is specified. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011254036(A) 申请公布日期 2011.12.15
申请号 JP20100128538 申请日期 2010.06.04
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI
分类号 H01L21/301 主分类号 H01L21/301
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