| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for machining a thin film, and a method for manufacturing a photoelectric converter, wherein defect such as a state that a part of a layer is peeled and floats or a state that electrical division of the layer is not sufficient is suppressed in a division process of each layer of the photoelectric converter or the thin film using a laser. <P>SOLUTION: By combining and using an ultrashort pulse laser and a pulse laser, a sufficient width of the division can be obtained while suppressing heat conduction in a division part, so that occurrence of the peeling of the layer of the division part, an electrical short circuit, and leak current can be suppressed. Thereby, for example, the high-reliability photoelectric converter having a long service life can be obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |
