METHOD OF MANUFACTURING SUBSTRATE AND SUBSTRATE, METHOD OF MANUFACTURING LAMINATE, AND LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate the defect of which is decreased or removed, and to provide the substrate.

SOLUTION: The method of manufacturing the substrate includes a step of grinding the substrate using a fluid including an abrasive member and abrasive particles and a step of grinding a plate to be ground using the abrasive member before grinding the substrate. The step of grinding the plate to be ground grinds the plate to be ground until a time when the rate of an increase of a D90 value per unit time of the abrasive particles included in fluid including the abrasive particles in grinding the plate to be ground by the use of the fluid including the abrasive member and the abrasive particles becomes ≤1.1 times a constant value when the rate of an increase per unit time of the D90 value of the abrasive particles included in the fluid including the abrasive particles is a constant value. The substrate is manufactured by the method of manufacturing the substrate.

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