| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection method capable of scanning the entire sample surface in a short time and detecting minute defect without causing thermal damage to the sample. <P>SOLUTION: A defect detection method comprises steps of: performing a pulse division on a pulse laser emitted from a light source, irradiating the pulse-divided pulse laser on the surface of a sample that rotates and moves in the single direction, detecting reflected light from the sample that is irradiated by the pulse-divided pulse laser, detecting defect on the sample by processing a detection signal of the reflected light, and outputting information on the detected defect on a display screen. The center of gravity of the light intensity of the pulse-divided pulse laser is monitored, and then the monitored center of gravity of the light intensity of the pulse-divided pulse laser is adjusted. <P>COPYRIGHT: (C)2012,JPO&INPIT |
