发明名称 |
METHOD OF GENERATING A HOLE OR RECESS OR WELL IN A SUBSTRATE |
摘要 |
The present invention relates to a method of generating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate generated by this method. The invention also relates to an array of holes or recesses or wells in a substrate generated by the method. The invention also relates to a device for performing the method according to the present invention.
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申请公布号 |
US2011304023(A1) |
申请公布日期 |
2011.12.15 |
申请号 |
US201013203492 |
申请日期 |
2010.03.01 |
申请人 |
SCHMIDT CHRISTIAN;DITTMANN LEANDER;PICODRILL SA |
发明人 |
SCHMIDT CHRISTIAN;DITTMANN LEANDER |
分类号 |
H01L23/544;B29C35/02;B29C35/08;B32B3/00;B32B3/10;F27D11/00;H01L21/30 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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