HIGH FIELD SENSITIVITY PLANAR HALL EFFECT SENSOR BASED ON FM/SPACER/AFM TRILAYER STRUCTURE

摘要

PURPOSE: A high magnetic field sensitivity planar hall effect sensor is provided to enhance magnetic field sensitivity and to reduce exchange coupling by enlarging an active current which passes through a ferromagnetic layer and forming a space layer thinly. CONSTITUTION: A high magnetic field sensitivity planar hall effect sensor is composed of an anti- ferroelectric material layer, a space layer, and a ferromagnetic layer. The ferromagnetic layer is composed of NiFe and NiCo. The space layer is composed of Cu, Ag, Au, Ru, and Ta. The anti- ferroelectric material layer is composed of IrMn and NiO. The high magnetic field sensitivity planar hall effect sensor appropriately has the exchange coupling of an appropriate size. The field sensitivity of the high magnetic field sensitivity planar hall effect sensor is high.