OBSERVATION IMAGE CLASSIFICATION REFERENCE OPTIMIZATION METHOD AND IMAGE CLASSIFICATION DEVICE

摘要

A first objective of the present disclosure is to minimize the MDC operation load when carrying out both automatic defect classification (ADC) and manual defect classification (MDC) operations. A second objective is to prevent overlooking defects of interest (DOI). The first objective is achieved by graphically displaying determination information for ADC/MDC allocations that are required when carrying out select ADC and select MDC. In such a circumstance, the category results of each ADC and MDC are also displayed in matrix form. Additionally, the rate of DOI being overlooked is calculated and graphically displayed for each category threshold that is employed in defect categories.