SURFACE FEED-IN ELECTRODE FOR DEPOSITION OF THIN FILM SOLAR BATTERY AND SIGNAL FEED-IN METHOD THEREOF

摘要

A surface feed-in electrode for deposition of a thin film solar battery and a signal feed-in method thereof are provided. The surface feed-in electrode comprises an electrode plate component and a signal feed-in component (201), wherein: an anode plate of the electrode plate component is connected with a positive electrode of a signal power and is connected to the ground; the electrode plate component has a signal feed-in port which is arranged in a concave circular surface in the central section of the back surface of a cathode plate; a shielding cover of the cathode plate of the electrode plate component has a through hole; the signal feed-in component (201) is step-shaped, constituted with a waist section and a head section, wherein the head section is semicircle-shaped; the signal feed-in component (201) is surface contacted with and is connected to the signal feed-in port by means of connecting the semicircle-shaped surface with the signal feed-in port; the signal feed-in component (201) is connected with a negative electrode of a radio frequency/very high frequency power to surface feed-in the radio frequency/very high frequency power signal. The surface feed-in electrode for the deposition of the thin film solar battery overcomes the loss caused by a distance of a feed-in wire when feeding in with one site or a plurality of sites, can evenly discharge electricity in a large area, removes standing wave effect and skin effect, improves the yields and reduces the costs.