IMPRINTING APPARATUS AND IMPRINTING METHOD USING THE SAME

摘要

PURPOSE: The flatness of the stage does not go mad influence on the process for forming pattern, the stains created in substrate diminishes. CONSTITUTION: An imprinting device(1) comprises a chamber unit(2), a stage(3), a mounting member(4), and a jetting unit(5). The chamber unit enforces the process forming the pattern in a substrate(10). The stage supports a substrate having resin layer(11). In order that the mounting member is located in the upper of the stage, it is installed in the chamber unit. A mold member(20) is attached to the mounting member. The pattern is formed in the substrate, the molded member metamorphoses the resin layer. The fluid for separating the substrate supported to the stage, from the stage is of resentment died. The molded member and resin layer are touched. The mounting member transfers the nearly molded member in the substrate separating.