The present invention is a container and a process for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.
申请公布号
EP2395127(A1)
申请公布日期
2011.12.14
申请号
EP20110169596
申请日期
2011.06.10
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
BEHM, PHILIP E.;MCDERMOTT, WAYNE THOMAS;XIAO, MANCHAO;PEARLSTEIN, RONALD MARTIN;LO, SAI-HONG A.;DERECSKEI-KOVACS, AGNES