发明名称 PROCESS FOR FORMING AN ELECTROACTIVE LAYER
摘要 There is provided a process for forming a layer of electroactive material having a substantially flat profile. The process includes: providing a workpiece having at least one active area; depositing a liquid composition including the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of −25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer.
申请公布号 KR20110134452(A) 申请公布日期 2011.12.14
申请号 KR20117023374 申请日期 2010.03.08
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 CHESTERFIELD REID JOHN;BUTLER JUSTIN;SANT PAUL ANTHONY
分类号 H01L21/208;H01L51/05 主分类号 H01L21/208
代理机构 代理人
主权项
地址