| 摘要 |
<p>A thin film solar cell manufacturing apparatus is provided which prevents the occurrence of transport wrinkles due to driving rollers transporting the film substrate, and which can improve workability. In the thin film solar cell manufacturing apparatus, a strip-shape flexible film substrate wrapped around a feedout roller is fed to a film deposition chamber maintained substantially in a vacuum state, electric discharge is induced across ground electrodes positioned to oppose each other and application electrodes having target material in the film deposition chamber, metal thin film, which becomes an electrode, is formed on the surface of the film substrate by constant heating, and the film substrate formed with metal thin film is taken up by a takeup roller provided in a takeup chamber; in the takeup chamber 5 a pair of driving rollers 14, 15, which transport, at constant tension, the film substrate 1 formed with metal thin firm 22, are provided, and elastic member layers 21 are formed on both end-portion peripheral faces of at least one of the driving rollers 15, the end-portion peripheral faces corresponding to both width-direction end portions of the film substrate.</p> |
