PATTERNING METHOD OF NANOHYBRID QUANTUM DOT PHOSPHOR-METAL OXIDE THIN FILM USING NANOIMPRINT AND MANUFACTURING METHOD OF LIGHT EMITTING DIODE

摘要

PURPOSE: A method for forming a nano hybrid quantum dot fluorescent substance-metal oxide thin film pattern using nano implant and a method for manufacturing an LED device are provided to form a finer quantum point on an optical crystal layer, thereby increasing light extracting efficiency and varying the color of emitted light. CONSTITUTION: A nano hybrid quantum dot fluorescent substance-metal-organic material precursor coating layer(30) is formed on a substrate(10). The nano hybrid quantum dot fluorescent substance-metal-organic material precursor coating layer is pressurized by an uneven mold(20). A nano hybrid quantum dot fluorescent substance-metal oxide thin film pattern(31) is formed by irradiating an ultraviolet ray on the pressurized nano hybrid quantum dot fluorescent substance-metal-organic material precursor coating layer. The mold is eliminated from nano hybrid quantum dot fluorescent substance-metal oxide thin film pattern.