APPARATUS OF POLYMER MICRO PROBE AND MANUFACTURING METHOD

摘要

PURPOSE: A polymer micro probe device and a manufacturing method thereof are provided to use a probe arranging method, thereby measuring a small sample or an uneven sample. CONSTITUTION: A body pattern unit(100) comprises a metal pad(110) of a honeycomb structure. A cantilever unit(200) is connected to the body pattern unit. The cantilever unit comprises a probe and a probe pattern. A polygonal object is formed in the end of the probe. A probe pattern is connected from the metal pad of the body pattern unit to a metal line.