| 摘要 |
PURPOSE: A lithographic device and a device manufacturing method are provided to form an inlet and an outlet where in the inlet and the outlet have ring shapes, thereby effectively including fluid in a space. CONSTITUTION: A heater heats first fluid in a first fluid path(110). A first temperature sensor(120) measures the temperature of first fluid in the first fluid path. A second temperature sensor(130) measures the temperature of second fluid in the second fluid path. The second temperature sensor exists in a bypass loop(160) of the first fluid path. A controller(150) controls the heater based on the temperatures sensed by the first and second temperature sensors. |
