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发明名称
Process for digging a deep trench in a semiconductor body and semiconductor body so obtained
摘要
申请公布号
EP1804281(B1)
申请公布日期
2011.12.14
申请号
EP20050425930
申请日期
2005.12.28
申请人
STMICROELECTRONICS SRL
发明人
COLOMBO, ROBERTO
分类号
H01L21/3065;H01L21/762
主分类号
H01L21/3065
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代理人
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