发明名称 VIBRATOR ELEMENT, VIBRATOR, VIBRATION DEVICE, ELECTRONIC APPARATUS, AND FREQUENCY ADJUSTMENT METHOD
摘要 PURPOSE: A vibrating piece, a frequency control method, a vibrator, a vibration device, and an electronic device are provided to glue a film on a first mass part or second mass part using a sputtering or evaporation process, thereby increasing the mass of a mass part. CONSTITUTION: A vibrating piece comprises a base part, a vibration arm(28), a first mass part(51), and a second mass part(54). The vibration arm vibrates with bending along Z-axis which is orthogonal to Y-axis. The first mass part and second mass part are arranged in the upper part of the vibration arm. A part or all of the first mass part and second mass part are eliminated by energy beam projection. The first mass part and second mass part adjust a resonant frequency of the vibration arm. The first mass part is arranged in the upper part of a first surface of the vibration arm. The second mass part is arranged in the upper part of a second surface of the vibration arm. The first mass part and second mass part include a part which is not overlapped when observed along the Z-axis.
申请公布号 KR20110134272(A) 申请公布日期 2011.12.14
申请号 KR20110051104 申请日期 2011.05.30
申请人 SEIKO EPSON CORPORATION 发明人 KAWAI HIROKI
分类号 H03H9/15;G01C19/56;G01C19/5628;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/253;H01L41/39;H03B5/30;H03H3/04;H03H9/02;H03H9/10;H03H9/19;H03H9/215;H03H9/24 主分类号 H03H9/15
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