| 摘要 |
The present invention provides a method for evaluating a solution for a coating film for semiconductor, which comprises measuring Clogging Degree of a solution for a coating film for semiconductor when the solution is filtrated through a filter having an average pore size of 0.01 to 0.4 mum, and estimating quality of the coating film formed from the solution, wherein the Clogging Degree is defined by the following formula: <?in-line-formulae description="In-line Formulae" end="lead"?>Clogging Degree=V2/V1<?in-line-formulae description="In-line Formulae" end="tail"?> V1: A value of linear velocity of filtrate (filtrating rate per 1 cm<SUP>2 </SUP>of filter (g/(cm<SUP>2</SUP>.min)) at initial standard point in the case that a solution is filtrated at a fixed pressure and temperature V2: A value of linear velocity of filtrate at the point the predetermined weight of filtrate discharged from the initial standard point According to the present method, quality of coating films can be figured out without actual formation of the coating films, and solutions for coating films can be evaluated thereby. |
