POLYMER CANTILEVER USING SILICON NANO-WIRE FOR PIEZORESISTIVE AND MANUFACTURING METHOD

摘要

PURPOSE: A method for manufacturing the polymer cantilever using a silicon-wire is provided to manufacture the high sensitive cantilever. CONSTITUTION: A metal wire is manufactured on the upper part of the silicon nano wire(S4). A cantilever pattern is formed on the upper part of the metal wire through a sensitive film(SU-8 2002) of a polymer materials(S5). The body pattern of a cantilever is formed on the upper part of the cantilever pattern through a sensitive film(SU-8 2050) of the polymer materials(S6). A bio-sensor pattern is formed on the upper part of the cantilever by using AZ5214 photo sensitizer(S7). A metal pad is formed on upper part of the body pattern of the cantilever with Ni through a electroplating process(S8).