| 摘要 |
A plasma coating plant for coating or treating the surface of a substrate having a work chamber which can be evacuated and into which the substrate can be placed, and having a plasma torch for generating a plasma jet by heating a process gas, wherein the plasma torch has a nozzle through which the plasma jet can exit the plasma torch and can extend along a longitudinal axis (A) into the work chamber, wherein a mechanical limiting apparatus is provided downstream of the nozzle in the work chamber, which mechanical limiting apparatus extends along the longitudinal axis (A) and protects the plasma jet against an unwanted lateral intrusion of particles. A corresponding method is also disclosed. |
