发明名称 |
Method for Manufacturing Micro-Structure |
摘要 |
A micro-structure is manufactured by patterning a sacrificial film, forming an inorganic material film on the pattern, providing the inorganic material film with an aperture, and etching away the sacrificial film pattern through the aperture to define a space having the contour of the pattern. The patterning stage includes the steps of (A) forming a sacrificial film using a composition comprising a cresol novolac resin and a crosslinker, (B) exposing patternwise the film to first high-energy radiation, (C) developing, and (D) exposing the sacrificial film pattern to second high-energy radiation and heat treating for thereby forming crosslinks within the cresol novolac resin. |
申请公布号 |
EP2395395(A2) |
申请公布日期 |
2011.12.14 |
申请号 |
EP20110169115 |
申请日期 |
2011.06.08 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KATO, HIDETO;KANBARA, HIROSHI;FURIHATA, TOMOYOSHI;HIRANO, YOSHINORI |
分类号 |
B81C1/00;G03F7/023 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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