发明名称 A CLEANING COMPOSITION FOR TFT-LCD OR SEMICONDUCTOR DISPLAYS
摘要 PURPOSE: A cleaning composition for TFT-LCD or semiconductor is provided to improve workability, anti-corrosion property to the metal membrane and cleaning effect to the all membrane, and satisfy stability and environmental-friendly. CONSTITUTION: A cleaning composition for TFT-LCD or semiconductor comprises 10-15 parts by weight tetramethylammonium hydroxide, 10-15 parts by weight monoethanolamine, and the residue of water. A cleaning composition additionally comprises 0.01-0.1 mercapto based compound on the basis of the total 100 parts by weight of the tetramethylammonium hydroxide, monoethanolamine and water. The mercapto based compound is one or more selected from the group consisting of mercaptomethyl imidazole, mercaptomethyl imidazole, thioglycerol, and thiolactic acid.
申请公布号 KR20110134185(A) 申请公布日期 2011.12.14
申请号 KR20100054033 申请日期 2010.06.08
申请人 DONGJIN SEMICHEM CO., LTD. 发明人 KIM, BYUNG UK;YOON, SUK IL;JEONG, JONG HYUN;HUH, SOON BEOM;SHIN, SUNG GUN;JUNG, SE HWAN;JANG, DOO YOUNG;PARK, SUN JOO;KWEON, OH HWAN;KIM, YOUNG GUN;KIM, MIN A
分类号 C11D7/32;C11D7/34;H01L21/304 主分类号 C11D7/32
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