发明名称 Fabrication Method of X-Ray Waveguides using Plasnomic light
摘要 PURPOSE: A manufacturing method of x-ray waveguides using plasmonic light is provided to manufacture a core of the X-rays waveguide by using a nano channel. CONSTITUTION: A nano wire pattern mask for a photolithography manufactures the core of X-rays wave guide. The nano wire pattern mask has the line width of nano millimeters and the length of millimeters. A dielectric nano thin film(10) is evaporated between a metallic foil(20). The nano wire pattern mask uses abnormal light guiding mode through a plasmon.
申请公布号 KR101091601(B1) 申请公布日期 2011.12.13
申请号 KR20090018948 申请日期 2009.03.05
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分类号 G02B6/13;B82Y40/00;G03F1/50;H01L21/027 主分类号 G02B6/13
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