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发明名称
MANUFACTURING DEVICE OF ORGANIC EL DEVICE AND METHOD OF MANUFACTURING ORGANIC EL DEVICE AND LAYER FORMING DEVICE AND LAYER FORMING METHOD
摘要
申请公布号
KR101092163(B1)
申请公布日期
2011.12.13
申请号
KR20110058421
申请日期
2011.06.16
申请人
发明人
分类号
H01L51/56;C23C14/56
主分类号
H01L51/56
代理机构
代理人
主权项
地址
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