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发明名称
MANUFACTURING METHOD OF MULTI-COMPONENT OXIDE THIN FILM HAVING SUPERLATTICE STRUCTURE
摘要
申请公布号
KR101093566(B1)
申请公布日期
2011.12.13
申请号
KR20100029518
申请日期
2010.03.31
申请人
发明人
分类号
H01L35/14;H01L21/316
主分类号
H01L35/14
代理机构
代理人
主权项
地址
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