Multiple element electrode cMUT devices and fabrication methods

摘要

Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. Some embodiments can include a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy. The forward or side looking intravascular device can generally comprise a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement. The plurality of cMUT arrays can each comprise a plurality of cMUT elements. At least a portion of the plurality of cMUT elements can comprise a flexible membrane disposed above the substrate and a multiple element electrode. The multiple element electrode can comprise a plurality of electrode elements shaped and sized to have a width less than the width of the membrane, and be further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy.