发明名称 Apparatus and a method for observing the surface of a sample
摘要 An apparatus for observing the appearance of the surface (2) of a sample (1), comprising a light source (11) for illuminating said surface (2) from a predetermined direction and means for observing the surface (2). The means of observing the surface (2) comprise a number of substantial flat mirrors (8) located in different directions with respect to said surface (2). The means furthermore comprise an optical system (6,14) for observing said flat mirrors (8). Each flat mirror (8) reflects an image of the surface (2) of the sample (1) to the image receiving part (6) of the optical system (6,14).
申请公布号 US8077319(B2) 申请公布日期 2011.12.13
申请号 US20070443737 申请日期 2007.09.28
申请人 WADMAN SIPKE;KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 WADMAN SIPKE
分类号 G01N21/47 主分类号 G01N21/47
代理机构 代理人
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