发明名称 |
Circuit arrangement to adjust and calibrate a MEMS-sensor device for flow measurement of gases or liquids |
摘要 |
Circuitry is disclosed for the calibration of heating element and ambient temperature sensors, comprising: a) an amplifier having positive and negative inputs, and an output; b) one or more heating MOS transistors selectably coupled in parallel and having 1) a heating transistor drain coupled to the positive input of the amplifier; 2) a heating transistor source configured to receive a supply voltage; and 3) a heating transistor gate coupled to the amplifier output; c) one or more ambient MOS transistors selectably coupled in parallel and having 1) an ambient transistor drain, 2) an ambient transistor gate coupled to the amplifier output; and 3) an ambient transistor source configured to receive the supply voltage; d) a temperature difference resistance configured: 1) to be coupled at least partially between an ambient connection and the ambient transistor drain; and 2) to be coupled at least partially between the ambient connection and the negative input of the amplifier. |
申请公布号 |
US8075178(B2) |
申请公布日期 |
2011.12.13 |
申请号 |
US20090369645 |
申请日期 |
2009.02.11 |
申请人 |
KRAUSS MATHIAS;JAAFAR MAHA;ZENTRUM MIKROELEKTRONIC DESDEN AG |
发明人 |
KRAUSS MATHIAS;JAAFAR MAHA |
分类号 |
G01K15/00;G01F1/696;G01F1/698 |
主分类号 |
G01K15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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