Variable feature interface that induces a balanced stress to prevent thin die warpage

摘要

A packaged semiconductor product includes a packaging substrate coupled to a semiconductor die through an interconnect structure with elements of variable features. The interconnect structure may be bumps or pillars. The variable features of the interconnect structure induce a reverse bend on the semiconductor die that mitigates warpage of the semiconductor die during semiconductor assembly by balancing bending of the packaging substrate during reflow. The variable features can be variable height and/or variable composition.