发明名称 |
Dual loading port semiconductor processing equipment |
摘要 |
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.
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申请公布号 |
USRE43023(E1) |
申请公布日期 |
2011.12.13 |
申请号 |
US20100724026 |
申请日期 |
2010.03.15 |
申请人 |
NAKASHIMA TAKANOBU;MATSUNAGA TATSUHISA;YANAGAWA HIDEHIRO;HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
NAKASHIMA TAKANOBU;MATSUNAGA TATSUHISA;YANAGAWA HIDEHIRO |
分类号 |
F26B21/06;B65G49/07;H01L21/677 |
主分类号 |
F26B21/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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