发明名称 SEMICONDUCTOR DEVICE WITH BURIED BITLINE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device with a buried bit line and a manufacturing method thereof are provided to simultaneously expose and bond parts of sidewalls of active areas, thereby making a bonding depth uniform. CONSTITUTION: An active area(21B) is separated by a trench. A separation film(37A) separates the inside of the trench. The separation film is placed between buried bit lines(BBL1~BBL4). The buried bit lines are buried in the trench. Junctions(34A,34B) are formed on both sidewalls of the trench. A sidewall contact is formed between the junctions and the buried bit line.
申请公布号 KR20110133330(A) 申请公布日期 2011.12.12
申请号 KR20100053001 申请日期 2010.06.04
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HONG, KI RO
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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