| 摘要 |
PURPOSE: The load delivered to the substrate is controlled based on the driving force of the driving part to the high precision. CONSTITUTION: A precision press device comprises a water pressure part(2), a presser portion(1), press stages(50a,50b), a driving part(11), a chamber(16), and a fluid operating unit. The presser portion faces in the water pressure part. It is moved about the water pressure part. The press stages install to each opposite side of the presser portion and water pressure part. The driving part drives the presser portion. In the state where the water pressure part and presser portion each other approach. The cylindrical wall of the chamber surrounds the press stage between the water pressure part and presser portion with the sealing state. The fluid actuated part offsets force for pulling the hydraulic unit and the pressing unit to each other, which is generated on the basis of negative pressure(22) of the chamber, and each other pull the water pressure part and presser portion. |
