发明名称 METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND MISMATCH
摘要 Autonomous biologically based learning tool system(s) and method(s) that the tool system(s) employs for learning and analysis of performance degradation and mismatch are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. Objectively generated knowledge gleaned from synthetic or production data can be utilized to determine a mathematical relationship among a specific output variable and a set of associated influencing variables. The generated relationship facilitates assessment of performance degradation of a set of tools, and performance mismatch among tools therein.
申请公布号 KR20110133497(A) 申请公布日期 2011.12.12
申请号 KR20117025734 申请日期 2010.02.03
申请人 TOKYO ELECTRON LIMITED 发明人 KAUSHAL SANJEEV;PATEL SUKESH J.;SUGISHIMA KENJI
分类号 G06F15/18 主分类号 G06F15/18
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