| 摘要 |
PURPOSE: A method for stably producing a chlorosilane compound containing trichloro silane using a fluidized gas phase reactor and the fluidized gas phase reactor for the same are provided to prevent the generation of environmental pollution by reducing the generation rate of unnecessary byproducts. CONSTITUTION: A method for stably producing a chlorosilane compound containing trichloro silane uses a fluidized gas phase reactor(20). The fluidized gas phase reactor includes a lower part(21), an upper part, an expanding section(25), an internal cooling device(29), an initial filler inlet(31), an metallurgical silicon injecting device, an initial filler injecting device(31-1), a cyclone(37), and a thermocouple(51). A cooling jacket surrounds the external wall of a reacting layer. Convection of fillers filled in the cooling jacket and the reacting layer generates a cooperative cooling action. Reaction heat generated from an electric reaction is controlled by the cooperative cooling action and the cooling action of gas. The thermocouple monitors the temperature in the reactor in real time.
|
