发明名称 TEXTURING OF MULTI-CRYSTALLINE SILICON SUBSTRATES
摘要 <p>Etching solutions for etching and texturing of multi-crystalline silicon substrates, particularly for use as solar cells or photovoltaic devices are described. The solutions of the present invention provide more consistent and uniform texturing over the entire life of the solution, resulting in fewer discarded wafers, increased reliability and yield and lower costs. The etching solutions HF/HN03/H20 solutions having silicon dissolved therein.</p>
申请公布号 WO2011152973(A1) 申请公布日期 2011.12.08
申请号 WO2011US36163 申请日期 2011.05.12
申请人 ASIA UNION ELECTRONIC CHEMICAL CORPORATION;DOVE, CURTIS;SINGH, BALJIT;BAUER, GREG;HU, JACKSON;BALOOCH, MEHDI 发明人 DOVE, CURTIS;SINGH, BALJIT;BAUER, GREG;HU, JACKSON;BALOOCH, MEHDI
分类号 H01L21/311 主分类号 H01L21/311
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