发明名称 |
Ablation Of Film Stacks In Solar Cell Fabrication Processes |
摘要 |
A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.
|
申请公布号 |
US2011300665(A1) |
申请公布日期 |
2011.12.08 |
申请号 |
US20100795526 |
申请日期 |
2010.06.07 |
申请人 |
HARLEY GABRIEL;KIM TAESEOK;COUSINS PETER JOHN |
发明人 |
HARLEY GABRIEL;KIM TAESEOK;COUSINS PETER JOHN |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|