| 发明名称 |
HIGH-RESOLUTION MICROSCOPY AND PHOTOLITHOGRAPHY DEVICES USING FOCUSING MICROMIRRORS |
| 摘要 |
The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors. |
| 申请公布号 |
US2011300490(A1) |
申请公布日期 |
2011.12.08 |
| 申请号 |
US201013145916 |
申请日期 |
2010.01.23 |
| 申请人 |
RACHET BASTIEN;MERENDA FABRICE;SALATHE RENE |
发明人 |
RACHET BASTIEN;MERENDA FABRICE;SALATHE RENE |
| 分类号 |
G03F7/20;G02B21/08;G02B21/14;G03B27/54 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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