发明名称 |
FLUSH MOUNTED FASTENER FOR PLASMA PROCESSING APPARATUS |
摘要 |
A fastener assembly for parts of a plasma chamber. The fastener assembly includes a bolt with a tool engaging socket and a spring-loaded pin which fits in a through hole of the bolt. When installed, the spring-loaded pin substantially fills the space in the socket and thus prevents parasitic plasma from forming in spaces between opposed surfaces of the pin and bolt. When a tool such as a hex key is inserted into the socket, the spring-loaded pin retracts and the tool rotates the bolt to attach an upper part to a lower part by engaging threads of the bolt with a threaded hole in the lower part. |
申请公布号 |
WO2011102884(A3) |
申请公布日期 |
2011.12.08 |
申请号 |
WO2011US00239 |
申请日期 |
2011.02.10 |
申请人 |
LAM RESEARCH CORPORATION;SEXTON, GREGORY |
发明人 |
SEXTON, GREGORY |
分类号 |
H01L21/205;H01L21/3065;H05H1/46 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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