| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently manufacture a solar cell having a long, effective minority charge carrier lifetime (i.e. τ<SB POS="POST">eff</SB>≤500 μs). <P>SOLUTION: A method of manufacturing a solar cell having an effective minority charge carrier lifetime (τ<SB POS="POST">eff</SB>) of at least 500 μs comprises: providing a semiconductor wafer; and passivating a surface of the wafer by ALD-depositing a metal oxide layer on the surface. The ALD depositing is performed by sequentially and alternately performing steps: (i) exposing the surface to a first precursor, resulting in a coverage of the surface with the first precursor, and (ii) exposing the surface to a second precursor, resulting in a coverage of the surface with the second precursor. At least one of the steps (i) and (ii) is stopped before the coverage of the surface reaches a saturation level. <P>COPYRIGHT: (C)2012,JPO&INPIT |
