| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular speed detection device for determining whether the driving signal transmission line of a connection means for electrically connecting a sensor part to a detection part is cut off. <P>SOLUTION: A C/V conversion circuit 23 outputs a voltage Vcv obtained by converting the capacitance of capacitors Cs1 through Cs4 in which a carrier signal Vs is applied to the movable electrodes and driving signals Vsv+ and Vsv- are applied to the fixed electrodes. A determination logic 25 determines disconnection of connection lines L1 through L4 transmitting the driving signal Vsv+ and Vsv- for performing servo control from a circuit chip 3 side to a sensor chip 2 side based on a voltage Vcmp obtained by level-converting the voltage Vcv via a comparator 24. <P>COPYRIGHT: (C)2012,JPO&INPIT |
