发明名称 SEMICONDUCTOR DEVICE TEST APPARATUS, TEST SYSTEM, AND TEST METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a test device, a test system, and a test method which are capable of shortening a test time by solving at least a part of the various problems in a conventional multi-site test or concurrent test. <P>SOLUTION: A test apparatus 20 for simultaneously testing a first semiconductor device 1 having a first IP core 4 and a second IP core 5 integrated thereinto, and a second semiconductor device 2 having a first IP core 4 and a second IP core 5 integrated thereinto, includes: a workstation 21; a first test circuit 22 for testing the first IP cores 4; a first power supply circuit 23 for supplying power to the first semiconductor device 1; a second test circuit 24 for testing the second IP cores 5; and a second power supply circuit 25 for supplying power to the second semiconductor device 2. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011247591(A) 申请公布日期 2011.12.08
申请号 JP20100117628 申请日期 2010.05.21
申请人 VERIGY (SINGAPORE) PTE LTD 发明人 TAKAHASHI YASUHIRO
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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