| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a cylindrical silicon crystal by which the cylindrical silicon crystal is manufactured from silicon raw material without cutting, and provide the cylindrical silicon crystal manufactured by the manufacturing method. <P>SOLUTION: A melt storage container formed of material with a smaller thermal expansion coefficient than that of silicon and a high melting point, and a core formed of material with a greater thermal expansion coefficient than that of the silicon and a high melting point are used. Silicon nitride (Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>) is coated on an inner surface of the melt storage container and an outer surface of the core, and the core is arranged inside the melt storage container. Silicon melt is filled in an air gap formed by the inner surface of the melt storage container and the outer surface of the core, and a temperature gradient is generated from a bottom surface side to an upper side of the melt storage container while maintaining liquid repellency of the silicon melt to solidify the silicon melt. <P>COPYRIGHT: (C)2012,JPO&INPIT |
