| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve stability and uniformity of an organic film to be formed, by solving the problems that a porous ceramic sinter of oxidized aluminum or the like to be used for vacuum vapor deposition of the organic film contains much impurities that may cause deterioration of organic film characteristics, and it is difficult to control stability and uniformity of the organic film to be formed. <P>SOLUTION: A container 10 having an opening part is filled with thermal conductor powders 12, an organic material 11b for organic film formation is immersed from a bottom side of the container 10 into the thermal conductor powders 12, and a cover part 13 is provided to seal the opening part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
