| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of forming carbon nanotube capable of restraining the lowering of the growth rate of carbon nanotube while suppressing the generation of particle and a forming apparatus of carbon nanotube. <P>SOLUTION: In this method of forming carbon nanotube 33 by thermal cracking of acetylene gas, first, a metal nitride layer 32N is formed by nitriding treatment with nitrogen plasma of a catalyst metal layer 32 comprising cobalt. Then, the metal nitride layer 32N is heated to a temperature not higher than the temperature at which acetylene gas is thermally cracked and the metal of nitriding catalyst is microparticulated to form a microparticulate film 32P. Finally, carbon nanotube 33 is formed on the microparticulate film 32P, by thermally cracking acetylene gas by raising the temperature of the microparticulate film 32P to the temperature at which acetylene gas is thermally cracked and keeping it there. <P>COPYRIGHT: (C)2012,JPO&INPIT |
