SELECTIVE EMITTER SOLAR CELLS FORMED BY A HYBRID DIFFUSION AND ION IMPLANTATION PROCESS
摘要
Solar cells and methods for their manufacture are disclosed. An example method may include providing a silicon substrate and introducing dopant to one or more selective regions of the front surface of the substrate by ion implantation. The substrate may be subjected to a single high-temperature anneal cycle. Additional dopant atoms may be introduced for diffusion into the front surface of the substrate during the single anneal cycle. A selective emitter may be formed on the front surface of the substrate such that the one or more selective regions of the selective emitter layer are more heavily doped than the remainder of the selective emitter layer. Associated solar cells are also provided.
申请公布号
WO2011152986(A2)
申请公布日期
2011.12.08
申请号
WO2011US36720
申请日期
2011.05.17
申请人
SUNIVA, INC.;ROHATGI, AJEET;YELUNDUR, VIJAY;DAVIS, HUBERT, PRESTON;CHANDRASEKARAN, VINODH;DAMIANI, BEN
发明人
ROHATGI, AJEET;YELUNDUR, VIJAY;DAVIS, HUBERT, PRESTON;CHANDRASEKARAN, VINODH;DAMIANI, BEN